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针对柔性基底上电流体动力学(EHD)喷射打印易受残余电荷影响而失稳的问题，提出了一种金属-石英复合喷嘴EHD喷射打印方法，实现聚合物半导体均匀微米线的高分辨率图案化制备。复合喷嘴通过轴向分段结构降低了残余电荷积累趋势。为阐明其作用机制，建立电场-两相流耦合模型，对喷嘴的射流演化及电荷密度分布进行对比分析。结果表明，复合喷嘴可减弱喷嘴出口及基底邻近区域的电荷集中程度，提高锥喷射稳定性。在柔性基底上制备了最小线宽为3μm的有机半导体微米线阵列，基于该微米线构筑的有机场效应晶体管(OFET)空穴迁移率为0.9 cm2·V-1·s-1,开关电流比为0.6×105。研究结果表明，该方法可为柔性基底上聚合物半导体微结构的稳定、高分辨率制备提供技术支持。
Abstract：To address the instability of electrohydrodynamic(EHD) jet printing on flexible substrates caused by residual charge accumulation, a metal-quartz composite nozzle-based EHD jet printing method was proposed for the high-resolution patterning fabrication of uniform polymer semiconductor microwires. The composite nozzle reduced the tendency of residual charge accumulation through its axially segmented structure. To clarify the underlying mechanism, an electric-field/two-phase-flow coupled model was established to comparatively analyze the jet evolution and charge density distribution of different nozzles. The results show that the composite nozzle can weaken charge concentration near the nozzle outlet and substrate region, thereby improving cone-jet stability. Organic semiconductor microwire arrays with a minimum linewidth of 3 μm were fabricated on flexible substrates. Organic field-effect transistors(OFETs) based on the microwires exhibit a hole mobility of 0.9 cm2·V-1·s-1 and an on/off current ratio of 0.6×105. These results demonstrate that the proposed method can provide technical support for the stable, high-resolution fabrication of polymer semiconductor microstructures on flexible substrates.
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基本信息:
DOI：10.13290/j.cnki.bdtjs.2026.08.003
中图分类号:TN30
引用信息:
[1]佀萌,周星宇,路良坤.金属-石英复合喷嘴电喷印柔性基底有机半导体微米线[J].半导体技术,2026,51(08):777-783.DOI:10.13290/j.cnki.bdtjs.2026.08.003.
基金信息:
国家自然科学基金青年科学基金(52505644); 河南省科技攻关项目(252102220105); 郑州经贸学院青年科研基金(QK2621)
2026-06-09
2026-06-09
2026-06-09